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Foreline Valve opens (after a 2 second delay).Mechanical pump turns on and automatically performs the following steps.This procedure is normally not necessary and should only be done by the Cleanroom Engineer, unless instructed otherwise. Turn “System” power switch “ON”, Ion Gauge Controller “ ON “ (NB: do not turn on the ion gauge unless the thermocouple gauge for the main chamber indicates that the chamber is under vacuum), the Power cord to controls and E-Beam power supply are plugged in.The E-Beam supply cart along with the cryo pump compressor and mechanical pump are controlled by the micro processor in the control cabinet via remote contactor panel which are all located outside the cleanroom. The access panels on the sides of the cart are interlocked to cut power to E-Beam Gun and Thermal Resistance if any are removed.
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To the left of the chamber, is the knob for E-beam Gun turret, permitting selection of up to four sources and to the rear, the manual shutter control. Located on the right side of theĬhamber is the Thermal Resistance Heating power control Variac and this is interlocked to operate only when the chamber is under evaporation mode. The chamber hoist, contactor panel, Glow-Discharge transformer, Thermal Resistance Heating transformer and Electron Beam Gun transformer are also located on the cart. The chamber cart, situated next to the control cabinet, consists of a chamber backed by a CTI Cryo-Torr 8 pump and vacuum valve system. The automation allows users to operate the Evaporator 2000 with minimal training and is interlocked for system failsafe. The control cabinet houses a microprocessor, operation control panel, Ion and thermocouples gauges controller, Inficon Film thickness monitor, CTI Cryo pump temperature monitor, Airco CV8 Electron Beam control module and various other minor control electronics. The Evaporator 2000 system is an automated vacuum process control system for Physical Vapour Deposition (PVD) of metals, and non-metals, consisting of a control cabinet, chamber cart, E-Beam power supply cart, Cryo pump compressor cart and mechanical vacuum pump. This SOP is meant to be used by properly trained operators only. This is an Airco Temescal evaporator modified and automated by Doug Wong in 2000 and is commonly known in the AMPEL facility as the Evaporator 2000 system or the DeeWong Evaporator.
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Purpose: To describe how to use the evaporator for Physical Vapor Deposition (PVD) by Electron Beam and Resistance Heating. 00: David Webster, TRIUMF, October 22, 1993.
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Note: If the HIVAC valve is completely closed and the temperature reads outside of the 12–14oC range contact support personnel in the clean room immediately for assistance 5.Ebeam Evaporator Standard Operating Procedure – Revision 04 Check the Cryogenics Temperature Indicator (CTI) located on the right side of the chamber, it should read 12–14oC if the temperature increases, check the HI VAC valve to make sure it is completely closed. Turn the knob counter clockwise (to your left) to open you should be able to feel suction at the opposite end of the of the valve opening 4. CV-8 bottom ends, lot of two, and one controller.įigure 4 – Vent Valve – Located inside the front panel below and to the left of the Bell Jar Base 3. Airco Temescal CV-14, 14 kw E Beam power supply w/1 gun controller & 1 beam position sweep controller. TEMESCAL SIMBA 2 ELECTRON BEAM POWER SUPPLY Temescal’s Simba 2 is a constant-voltage, 15-kW electron beam power supply designed to power and control up to three electron. REPAIR OF TEMESCAL MODEL POWER SUPPLIES CV-8 AND CV-14. IF YOU ARE LOOKING FOR REPLACEMENT PARTS OR. Parts and service for Airco Temescal electron beam guns, power supplies and sweeps.
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